Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory

نویسندگان

چکیده

Diverse areas such as the Internet of Things (IoT), aerospace and industrial electronics increasingly require non-volatile memory to work under high-temperature, radiation-hard conditions, with zero standby power. Nanoelectromechanical (NEM) relays uniquely have potential at 300 °C absorb high levels radiation, leakage current across entire operational range. While NEM that utilise stiction for operation been demonstrated, it is not clear how design a relay reliably achieve given programming reprogramming voltages, an essential requirement in producing memory. Here, we develop analytical, first-principle physics-based model rotational provide detailed understanding voltages vary based on device dimensions surface adhesion force. We then carry out experimental parametric study critical dimension $\approx ~\mathrm {80~~\, \text {n} {m} }$ characterise force, derive guidelines should be dimensioned contact feature size constraints operating requirements. scaling show {1~~\, {V}}$ footprint {2~~\, \mu ^{2}}$ can achieved {10~~\, , this architecture. [2021-0138]

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ژورنال

عنوان ژورنال: Journal of microelectromechanical systems

سال: 2022

ISSN: ['1941-0158', '1057-7157']

DOI: https://doi.org/10.1109/jmems.2021.3138022